Setpoint relays (SP1, SP2) are Form C (NO, NC, Common). Pin assignments are in the manual’s Table 3-2. Typical use: Activate a roughing pump or close a valve at a threshold pressure.
: Features closed-loop power control with less than 1% full-scale accuracy, ensuring repeatable results across different wafers and equipment. mks astron 2l manual
The ASTRON 2L is designed for stable, high-flow reactive gas delivery with the following parameters: : Optimized for 100% NF3NF sub 3 (Nitrogen Trifluoride) processing. Operating Pressure : Ignition : 1 to 4 Torr (measured at the outlet). Post-Ignition : 1 to 10 Torr once flow is stabilized. Setpoint relays (SP1, SP2) are Form C (NO, NC, Common)
MKS ASTRON® 2L is a compact, self-contained remote plasma source (RPS) used primarily for high-efficiency chamber cleaning in semiconductor manufacturing. It typically dissociates more than 95% of cap N cap F sub 3 : Features closed-loop power control with less than
The manual describes a sophisticated "transformer-type" discharge mechanism:
(since I'm an AI), but I can help you prepare the manual content so you can print it yourself.
MKS Remote Plasma Refurbishment Data Sheet : Outlines maintenance procedures and service center information.